Particle-PLUS EXAMPLE - Cylindrical Target Model

Wave Front (Japanese)CAE Solution (Japanese)Particle-PULSEXAMPLE > Cylindrical Target Model
[Japanese(日本語)]   [English]

Computation Summary

An example of a simulation for a cylindrical target magnetron sputtering is shown. The simulation cost is not large, because simulation over all region of a chamber is NOT needed due to use of (1) axi-symmetric model and (2) mirror symmetric boundary condition. (Click here or Reload this page, if PDF file is not displayed.)