Particle-PLUS EXAMPLE - Dielectric Sputtered by RF Magnetron
Wave Front (Japanese)
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CAE Solution (Japanese)
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Particle-PULS
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EXAMPLE
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RF Magnetron Sputtering for Dielectric Target
[Japanese（日本語）] [English]
[Japanese（日本語）] [English]
Computation Summary
An example of a simulation for a RF magnetron sputtering for a dielectric target is shown.
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