Particle-PLUS EXAMPLE - RF Magnetron Sputtering

Wave Front (Japanese) ＞ CAE Solution (Japanese) ＞ Particle-PULS ＞ EXAMPLE ＞ RF Magnetron Sputtering
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Computation Summary

An example of a simulation for a RF magnetron sputtering is shown. (Click here or Reload this page, if PDF file is not displayed.)

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Electron Density (initial) [Download]

Electron Density (steady) [Download]